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Unique plasma doping solution targeted for 22nm and beyond logic and memory chips
March 16, 2011
By: DAVID SAVASTANO
Editor, Ink World Magazine
Applied Materials, Inc. unveiled its new Applied Centura ConformaTM system, which features breakthrough Conformal Plasma Doping (CPDTM) technology to enable the fabrication of advanced 3D structures in next-generation logic and memory chips. The Conforma system uniquely combines high-dose, low energy doping technology with in-situ clean capability in a single vacuum chamber to deliver uniform, high throughput doping on both planar and 3D structures. Also vital to good device performance is t...
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